Organizers:

Representative

Co-Organizers

Correspondence

Scope:

(Tentative) Advance in micro/nano fabrication technologies makes possible to produce various kinds of micro/nano devices such as micro/nano electromechanical systems(MEMS/NEMS) and micro total analysis systems (microTAS). This symposium will mainly focus on MEMS/NEMS, microTAS and related technologies. This symposium will cover wide range of MEMS technologies including BioMEMS, Power MEMS, Optical MEMS, and so on. Related fabrication technoligies such as micromachining, three-dimensional fabrication, and assembling processes are also welcome. In addition, this symposium will highlight microfluidic devices such as microTAS and lab-on-a-chip devices for chemical, biochemical, and biological applications. Nanomaterials, bio-inspired materials and systems for MEMS/NEMS and microTAS are also covered. This symposium will bring together mechanical and electrical engineers, chemists, biologists, physicists, and material scientists to discuss state-of-the-art science and technologies related to MEMS/NEMS and microTAS.

Topics:

(Tentative)

• Micro/Nano electromechanical Systems (MEMS/NEMS)
• BioMEMS, bio-inspired materials and systems
• Micro total analysis sysmtems and Lab-on-a-chip
• Power MEMS and energy harvesting devices
• Optical MEMS and nanophotonics
• Microactuators and microsensors
• Micro/nano fabrication technologies
• Micro/nano manipulation and assembly
• Nanomaterials and Nanodevices

Keynote Speakers:

Invited Speakers:

Co-sponsored by Professional Committee of Micro-Nano Engineering, the Japan Society of Mechanical Engineers