Symposium

Symposium D-4:
Fluctuation-Induced Plasma Processing of Materials

Organizers:

Representative
  • Masaharu SHIRATANI
Kyushu University
Co-Organizers
  • Shojiro KOMATSU
National Institute for Materials Science
  • Fumiyoshi TOCHIKUBO
Tokyo Metropolitan University
  • Masafumi ITO
Meijo University
  • Eun Ha CHOI
Kwangwoon University
  • Boonchoat PAOSAWATYANYOUNG
Chulalongkon University
Correspondence
  • Akihisa OGINO
Shizuoka University taogino@ipc.shizuoka.ac.jp

Scope:

Plasma-based fabrication of nanomaterials and nanostructures is widely employed for top-downprocesses such as ULSI processing as well as bottom-up processes such as carbon nanotube production. In this session, the attendees will discuss frontier science of interactions between plasmas and nano-interfaces by focusing on novel features such as fluctuations of interactions due to the nanometer scale. Plasma processing based on the science realizes highly precise top-down processes by suppressing fluctuations and well controlled self-organized bottom-up processes bycontrolling fluctuations. Fluctuation-Induced Processing of Materials is expected to bring about an explosive development of fabrication technologies of nanomaterials and nanostructures.

Topics:

  • Generation of interactions between plasmas and nano-interfaces
  • Diagnostics of interactions between plasmas and nano-interfaces
  • Applications of interactions between plasmas and nano-interfaces

Keynote Speakers:

  • JeonGeon HAN
Sungkyunkwan University

Lecture title: Plasma Process Design for Functional Film Synthesis on Plastic Substrate

  • Kazuo TERASHIMA
Tokyo University

Lecture title: Plasma in supercritical fluid and its application to materials processimg - density-fluctuation-induced plasma processing of nanomaterials -

Invited Speakers:

  • Toshiaki KATO
Tohoku University

Lecture title: Advanced plasma CVD for structural-controlled growth of single-walled carbon nanotube and graphene

  • Hiroki KONDO
Nagoya University

Lecture title: Advanced plasma science and technologies for nanostructure control of carbon nanomaterials

  • Tomohiro NOZAKI
Tokyo Institute of Technology

Lecture title: Silicon Nanocrystal Thin Films: Application to Quantum-dot Photovoltaics

  • Koichi ONO
Kyoto University

Lecture title: Surface Roughening and Rippling during Plasma Etching

  • Satoshi HAMAGUCHI
Osaka University

Lecture title: Ion-bombardment-induced diffusion and drift of impurity atoms in solids

  • Uros CVELBAR
Jozef Stefan Institure

Lecture title: Making nanowires ultra-nanoporous

  • Partha Sarathi MUKHERJEE
IMMT

Lecture title: ADVANCED THERMAL PLASMA PROCESSING FOR MAKING VALUE ADDED PRODUCTS

  • Vladimir SVRCEK
AIST

Lecture title: Interactions between plasmas and silicon nanocrystals interfaces

  • Osamu SAKAI
Kyoto Univ.

Lecture title: Roles of nonlinear transition phenomena in plasma processes

  • Call for Paper
  • Call for Exhibitions
  • Call for Paper